Demonstration of three-dimensional 35nF/mm2 MIM Capacitor integrated in BiCMOS Circuits

Autor:	Franck Badets, C. Rossato, Jean-Pierre Blanc, Thierry Jagueneau, E. Chataigner, A. Bajolet, Philippe Delpech, J.-C. Giraudin
Rok vydání:	2006
Předmět:	Materials science business.industry Electrical engineering High density Low leakage Hardware_PERFORMANCEANDRELIABILITY Bicmos technology law.invention Capacitor Hardware_GENERAL law Hardware_INTEGRATEDCIRCUITS Bicmos integrated circuits Bicmos circuits business Electronic circuit
Zdroj:	2006 Bipolar/BiCMOS Circuits and Technology Meeting.
ISSN:	1088-9299
Popis:	This paper summarizes the electrical characterization of MIM capacitor realized in three-dimensional. High density of 35nF/mm2 is obtained with low leakage current. Its integration in BiCMOS technology is demonstrated and three circuits are characterized
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3e7a40105c43ad2a161718e899d7374f https://doi.org/10.1109/bipol.2006.311152 Zobrazit plný text záznamu