Growth of 3C-SiC on Si(100) by LPCVD and Patterning of the Grown Layers

Autor:	A.A. Ivanov, Dirk Piester, Hergo-Heinrich Wehmann, Erwin Peiner, Ingo Behrens, Andrey Bakin, Andreas Schlachetzki
Rok vydání:	2002
Předmět:	Materials science Mechanics of Materials business.industry Mechanical Engineering Optoelectronics General Materials Science Chemical vapor deposition Condensed Matter Physics business
Zdroj:	Materials Science Forum. :327-330
ISSN:	1662-9752
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3e54315860b5afdeb919443536039573 https://doi.org/10.4028/www.scientific.net/msf.389-393.327 Zobrazit plný text záznamu