Implementation of Short-Pulse Lasers for Wafer Scribing and Grooving Applications

Autor:	Kozuki Yasushi, Samuel Obi, Alexandre Pauchard, Nandor Vago, Masaki Takano, Michaël Pavius, Mathilde Gobet, Kyumin Lee
Rok vydání:	2010
Předmět:	Materials science business.industry Laser Wafer backgrinding Industrial and Manufacturing Engineering Pulse (physics) law.invention Die preparation law Optoelectronics Wafer Wafer dicing Electrical and Electronic Engineering business Instrumentation
Zdroj:	Journal of Laser Micro/Nanoengineering. 5:16-20
ISSN:	1880-0688
DOI:	10.2961/jlmn.2010.01.0004
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3e529d7e7330c1178f44b589aa08a696 https://doi.org/10.2961/jlmn.2010.01.0004 Zobrazit plný text záznamu