SAW pressure sensor based on single-crystal quartz layer transferred on Silicon

Autor:	Sylvain Ballandras, T. Signamarcheix, Lamine Benaissa, Emilie Courjon, Thomas Baron, Emmanuel Augendre, Sebastien Grousset
Rok vydání:	2013
Předmět:	Materials science Silicon business.industry chemistry.chemical_element Substrate (electronics) Quartz crystal microbalance Pressure sensor chemistry Electronic engineering Optoelectronics Wafer Electrical measurements business Layer (electronics) Quartz
Zdroj:	2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC).
DOI:	10.1109/eftf-ifc.2013.6702082
Popis:	In this paper, we present a wafer level approach to fabricate SAW pressure sensors on a single crystal AT-cut Quartz film transferred onto a bulk Silicon substrate. The final thickness of the quartz active layer was obtained using a combination of coarse mechanical thinning and fine polishing. Isolated Quartz membranes with a controlled thickness were then released by DRIE of the Silicon substrate. Details of the sensor fabrication process, modeling and electrical measurements are presented. In addition, theoretical considerations in good agreement with experimental results are disclosed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3e466461a9feffdbe807f2884bd98427 https://doi.org/10.1109/eftf-ifc.2013.6702082 Zobrazit plný text záznamu