The preparation and characterization of AlPO4 thin films via laser ablation of AlPO4-H4
| Autor: | Laura J. Sottile, Scott J. Riley, Kenneth J. Balkus, Bruce E. Gnade |
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| Rok vydání: | 1995 |
| Předmět: |
Materials science
Laser ablation Excimer laser medicine.medical_treatment Metals and Alloys Analytical chemistry Surfaces and Interfaces Substrate (electronics) Cristobalite Surfaces Coatings and Films Electronic Optical and Magnetic Materials Amorphous solid chemistry.chemical_compound Tridymite chemistry Materials Chemistry medicine Aluminium phosphate Thin film |
| Zdroj: | Thin Solid Films. 260:4-9 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/0040-6090(95)09482-2 |
| Popis: | An excimer laser (KrF, 248 nm) was used to deposit well-dispersed thin films of aluminum phosphate onto a titanium nitride substrate from an AlPO 4 -H 4 target. It was found that laser ablation of AlPO 4 -H 4 results in AlPO 4 cristobalite or aluminum orthophosphate as well as AlPO 4 tridymite and amorphous materials depending upon the conditions. The effects of laser power, substrate distance, atmosphere, and temperature on thin-film formation were studied. Low substrate temperatures and pulse energies between 50 mJ and 100 mJ resulted in growth of AlPO 4 cristobalite or aluminum orthophosphate. Low laser-power density and high substrate temperatures produced AlPO 4 tridymite on the substrate TiN surface. These first examples of laser-ablated AlPO 4 films were characterized by X-ray diffraction, X-ray fluorescence, infrared spectroscopy (FTIR) and scanning electron microscopy. |
| Databáze: | OpenAIRE |
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