Using FIB SEM to control the critical dimensions of nano-structured materials

Autor:	Steve Reyntjens, D.J. Stokes, D.H.W. Hubert, Oliver Wilhelmi, L. Roussel
Rok vydání:	2007
Předmět:	Materials science Nanolithography Sputtering Scanning electron microscope Nano Nanotechnology Chemical vapor deposition Electron beam-induced deposition Focused ion beam Soft materials
Zdroj:	2007 Digest of papers Microprocesses and Nanotechnology.
Popis:	Application of state-of-the-art focused ion beam technology (FIB), in combination with high-performance scanning electron microscopy (SEM), gives the ability to perform advanced nanofabrication, via sputtering or chemical vapor deposition. Numerous parameters must be considered in order to achieve high quality results, particularly where stringent critical dimensions are required or when dealing with challenges such as electrically insulating and/or soft materials.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3e07b3f073744330782da16e3d2613d0 https://doi.org/10.1109/imnc.2007.4456310 Zobrazit plný text záznamu