Fabrication of a hybrid field-effect structure for gas detection with diverse sensitive materials
| Autor: | Ignaz Eisele, M. Leu, T. Doll, B. Flietner, Josef Lechner |
|---|---|
| Rok vydání: | 1994 |
| Předmět: |
Kelvin probe force microscope
Imagination Materials science Chemical substance Fabrication business.industry media_common.quotation_subject Metals and Alloys Field effect Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Materials Chemistry Optoelectronics Gas detector Field-effect transistor Electrical and Electronic Engineering business Air gap (plumbing) Instrumentation media_common |
| Zdroj: | Sensors and Actuators B: Chemical. 19:632-636 |
| ISSN: | 0925-4005 |
| Popis: | We have developed a novel hybrid technique for manufacturing gas-sensing field-effect structures with an air gap. It is possible to find an optimum non-critical range for all technological parameters to ensure reliable evaluation of a work-function response caused by a gas reaction. To prove the efficiency of the device, room-temperature gas measurements with the well-known Pt (sensitive layer) and H 2 (gas) system have been carried out. Samples that are identically produced show reproducible signals of the same magnitude. Simultaneously we have recorded the electrical response of a platinum-coated Kelvin probe. It is shown that the results are transferable to those obtained by the Kelvin probe. |
| Databáze: | OpenAIRE |
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