Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems
| Autor: | Thomas Gessner, Jens Bonitz, Steffen Hartmann, Simon Böttger, Sascha Herrmann, Bernhard Wunderle, Stefan E. Schulz |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Fabrication Materials science Carbon nanotube actuators Nanotechnology 02 engineering and technology Carbon nanotube 021001 nanoscience & nanotechnology 01 natural sciences law.invention Reliability (semiconductor) law 0103 physical sciences Wafer 0210 nano-technology Actuator Nanoscopic scale |
| Zdroj: | NEMS |
| Popis: | In this paper we present a holistic wafer-level manufacturing process for nanoscopic sensor devices based on individualized single-wall carbon nanotubes (SWCNTs) integrated in MEMS. The fabrication technology is demonstrated in detail. Moreover, a first application in form of a MEMS test stage for SWCNT strain and reliability experiments is shown. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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