| Autor: |
徐向东 Xu Xiang-dong, 刘颖 Liu Ying, 陈火耀 Chen Huo-yao, 付绍军 Fu Shao-jun, 洪义麟 Hong Yi-lin, 邱克强 Qiu Ke-qiang, 刘正坤 Liu Zheng-kun |
| Rok vydání: |
2011 |
| Předmět: |
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| Zdroj: |
Optics and Precision Engineering. 19:2589-2595 |
| ISSN: |
1004-924X |
| DOI: |
10.3788/ope.20111911.2589 |
| Popis: |
To meet the need of soft X-ray self-supported transmission gratings for space detecting and plasma diagnostics,self-supported gold transmission gratings were successfully fabricated with the holographic lithography and plating technology.To obtain photo-resist mask patterns with steep sidewalls,a layer of Anti-reflection Coating(ARC) was used to attenuate standing wave resulting from the substrate with high reflectivity.Then,a plating mask was obtained by coating a protective chrome on the mask and using Reactive Ion Etching(RIE).In this process,the plating mask with desired duty cycle could be fabricated via changing the thickness of the protective coating.Finally,a self-supported transmission grating with a line density of 3 450 gr/mm(290 nm period),a duty cycle of 0.55 and 400 nm thick gold bars was fabricated by plating gold in grooves of plating mask.The grating size is up to 10 mm×15 mm,and its +1 order diffraction efficiency is about 5% in the soft X-ray band between 5 and 12 nm in the National Synchrotron Radiation Laboratory(NSRL). |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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