Principle of lifetime-engineering in 4H-SiC by ion implantation
| Autor: | Erlekampf, Jürgen, Kallinger, Birgit, Berwian, Patrick, Rommel, Mathias, Friedrich, Jochen, Frey, Lothar, Erlbacher, Tobias |
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| Rok vydání: | 2018 |
| DOI: | 10.24406/publica-fhg-401884 |
| Databáze: | OpenAIRE |
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