Fe-substituted silica via lattice dissolution–reprecipitation replacement for tungsten chemical mechanical planarization

Autor:	Seho Sun, Kangchun Lee, Ganggyu Lee, Yehwan Kim, Sungmin Kim, Junha Hwang, Hyungoo Kong, Kyung Yoon Chung, Ghulam Ali, Taeseup Song, Ungyu Paik
Rok vydání:	2022
Předmět:	General Chemical Engineering
Zdroj:	Journal of Industrial and Engineering Chemistry. 111:219-225
ISSN:	1226-086X
DOI:	10.1016/j.jiec.2022.04.001
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ce99fef112fa0c50b9e113855891de0 https://doi.org/10.1016/j.jiec.2022.04.001 Zobrazit plný text záznamu Full Text from ScienceDirect