Autor: |
Toshinori Ono, Hiroshi Yakushiji, Tomohiro Iwane, Akiyoshi Chayahara, Tatsuya Hinoue, Hiroshi Inaba |
Rok vydání: |
2010 |
Předmět: |
|
Zdroj: |
IEEE Transactions on Magnetics. 46:1584-1586 |
ISSN: |
0018-9464 |
DOI: |
10.1109/tmag.2010.2043416 |
Popis: |
Discrete track media were successfully fabricated by Cr ion implantation. The saturation magnetization of the CoCrPt-SiO2 perpendicular recording layer was decreased down to 6% by implanting Cr ions with a dosage of 1 × 1017 ions/cm and an ion energy of 20 keV. A resist mask with a discrete track pattern was prepared by e-beam lithography and the pattern was transferred to the recording layer by Cr ion implantation. A clear magnetic contrast of the tracks was observed and the average surface roughness was maintained less than 1 nm. A clear servo signal was obtained by spin-stand measurement using a flying head. Feasibility of discrete track media fabrication by Cr ion implantation was confirmed. |
Databáze: |
OpenAIRE |
Externí odkaz: |
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