Comparison of the Work Function of Pt–Ru Binary Metal Alloys Extracted From MOS Capacitor and Schottky-Barrier-Diode Measurements

Autor:	Kevin R. Coffey, Ravi M. Todi, Matthew Erickson, Katayun Barmak, Kalpathy B. Sundaram
Rok vydání:	2007
Předmět:	Materials science Condensed matter physics Schottky diode Crystal structure Electronic Optical and Magnetic Materials law.invention Capacitor Electrical resistivity and conductivity law Electronic engineering Work function Binary system Electrical and Electronic Engineering Diode Phase diagram
Zdroj:	IEEE Transactions on Electron Devices. 54:807-813
ISSN:	1557-9646 0018-9383
DOI:	10.1109/ted.2007.892352
Popis:	This paper describes a systematic comparison of work function for the Pt-Ru binary-alloy metals, extracted from capacitance-voltage (C-V) characteristics of MOS capacitors and the current-voltage (I-V) and C-V characteristics of Schottky-barrier diodes. Our results indicate that the work function of the Pt-Ru binary-alloy system can be tuned over the wide range of 4.8-5.2 eV. Furthermore, the results indicate that the change of film properties, i.e., resistivity, work function, and crystal structure, with composition is consistent with the equilibrium-phase diagram and that the work function in the face-centered cubic and the hexagonal-close-pack single-phase regions is only weakly dependent on composition while a strong dependence is observed in the intermediate compositional range. It is also observed that work-function values obtained from the Schottky I-V analysis are significantly lower than those extracted from the MOS C-V data
Databáze:	OpenAIRE
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