Noise analysis of the triaxial piezoelectric micro-accelerometer
| Autor: | Hang Guo, Rui Hao, Ma-hui Xu, Peng Hu, Hui Zhou, Yibo Zeng, Yongjian Feng, Lin-hui Zhu, Jie-nan Sheng |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Noise measurement Piezoelectric accelerometer Acoustics 020208 electrical & electronic engineering 02 engineering and technology Integrated circuit 021001 nanoscience & nanotechnology Accelerometer Piezoelectricity Noise (electronics) law.invention Background noise law Thermal 0202 electrical engineering electronic engineering information engineering 0210 nano-technology |
| Zdroj: | 2017 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA). |
| DOI: | 10.1109/spawda.2017.8340342 |
| Popis: | Noise is a major factor that constrains the performance improvement of piezoelectric micro-accelerometer in dealing with weak signals. This paper studies the noise source of piezoelectric accelerometer, which is based on theory and characteristics of noise. The background noise of the piezoelectric micro-accelerometer is composed of the mechanical thermal noise and the piezoelectric element noise. The mechanical thermal noise and noise of the piezoelectric element are modeled by the theory of thermodynamics and the noise characteristics of the integrated circuit. By modeling, analysis and calculation, it can be obtained the noise value of the mechanical thermal and the piezoelectric element are 1.53×10−2μg/1/2 and 3.6×10−2μg/f1/2 respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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