Compact chemical-resistant microvalve array using parylene membrane and pneumatic actuation

Autor:	null Zhishan Hua, O. Srivannavit, null Yongmei Xia, E. Gulari
Rok vydání:	2004
Zdroj:	Proceedings. 2004 International Conference on MEMS, NANO and Smart Systems, 2004. ICMENS 2004..
DOI:	10.1109/icmens.2004.1332268
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3cad3f400b587a4a3c0d163faa889b13 https://doi.org/10.1109/icmens.2004.1332268 Zobrazit plný text záznamu