Submicron gold structures formed by atomic force microscopy lithography on thin films of poly(methyl methacrylate)
| Autor: | Helge Steen, Kjell Ove Kongshaug |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Materials science
Thermal decomposition technology industry and agriculture Nanotechnology macromolecular substances Surfaces and Interfaces Sputter deposition Condensed Matter Physics Poly(methyl methacrylate) Surfaces Coatings and Films chemistry.chemical_compound chemistry Transition metal visual_art Materials Chemistry visual_art.visual_art_medium Solubility Methyl methacrylate Thin film Lithography |
| Zdroj: | Surface Science. 602:3051-3056 |
| ISSN: | 0039-6028 |
| DOI: | 10.1016/j.susc.2008.08.006 |
| Popis: | Thin films of poly(methyl methacrylate) (PMMA) (25 nm) deposited on gold coated glass substrates have been locally modified by exposure to biased atomic force microscopy (AFM) tips. Constant exposure currents in the range of 0.5–0.65 nA leads to removal of PMMA both by direct ablation and enhanced solubility in a developer solution. Possible mechanisms causing such modifications have been discussed. Submicron Au structures were formed by combining AFM lithography, involving localized removal of PMMA, with sputter deposition of gold and a lift-off process. |
| Databáze: | OpenAIRE |
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