Electrical and Structural Properties of TiO2 Thin Film Prepared at Different Annealing Temperatures by Sol-Gel Spin-Coating Method

Autor:	M. N. Asiah, Mohamad Rusop Mahmood, Mahamad Hisyam Mahamad Basri, Mohamad Hafiz Mamat, Mohd Khairul Ahmad
Rok vydání:	2013
Předmět:	Diffraction Spin coating Materials science Annealing (metallurgy) General Engineering Crystal structure eye diseases chemistry.chemical_compound chemistry Electrical resistivity and conductivity Titanium dioxide sense organs Composite material Thin film Sol-gel
Zdroj:	Advanced Materials Research. 667:371-374
ISSN:	1662-8985
DOI:	10.4028/www.scientific.net/amr.667.371
Popis:	Titanium Dioxide (TiO2) thin films have been prepared on glass substrates by using sol-gel method and spin-coating technique. The samples have been annealed at temperatures of 350°C ~ 500oC. The electrical and structural properties of the thin films due to the changes of annealing treatment process were investigated by 2 point probes I-V measurement and X-ray Diffraction (XRD) respectively. The result show that resistivity of the thin film decreased with annealing temperatures. XRD characterization indicates crystalline structure of TiO2 thin films improved as annealed at higher temperatures.
Databáze:	OpenAIRE
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