Impurity Gettering in (112)B HgCdTe/CdTe/Alternate Substrates

Autor: M. F. Vilela, David R. Rhiger, Jeffrey M. Peterson, L. O. Bubulac, Y. Chen, J. A. Arias, M. Jaime-Vasquez, P. J. Smith, C. M. Lennon, J. W. Bangs, R. N. Jacobs, J. D. Benson, E. A. Patten, Scott M. Johnson, J. K. Markunas, G. Brill, Priyalal Wijewarnasuriya, L. A. Almeida, D. D. Lofgreen, Andrew J. Stoltz
Rok vydání: 2013
Předmět:
Zdroj: Journal of Electronic Materials. 42:3217-3223
ISSN: 1543-186X
0361-5235
DOI: 10.1007/s11664-013-2780-z
Popis: The crystalline structure and impurity profiles of HgCdTe/CdTe/alternate substrate (AS; Si and GaAs are possibilities) and CdTe/AS were analyzed by secondary-ion mass spectrometry, atomic force microscopy, etch pit density analysis, and scanning transmission electron microscopy. Impurities (Li, Na, and K) were shown to getter in as-grown CdTe/Si epilayers at in situ Te-stabilized thermal anneal (~500°C) interfaces. In HgCdTe/CdTe/Si epilayers, indium accumulation was observed at Te-stabilized thermal anneal interfaces. Impurity accumulation was measured at HgCdTe/CdTe and CdTe/ZnTe interfaces. Processing anneals were found to nearly eliminate the gettering effect at the in situ Te-stabilized thermal anneal interfaces. Impurities were found to redistribute to the front HgCdTe/CdTe/Si surface and p–n junction interfaces during annealing steps. We also investigated altering the in situ Te-stabilized thermal anneal process to enhance the gettering effect.
Databáze: OpenAIRE