| Autor: |
Jean Chabbal, Regine Lemaitre, Yves Thenoz, Catherine Tassin |
| Rok vydání: |
1989 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| Popis: |
THOMSON-CSF is developing thinned CCDs for backside illumination which will provide high quantum efficiency for the detection of UV, soft X-ray and electrons of a few keV. The most critical stage of the process is the backside treatment of the thinned devices : accumulation condition is necessary to prevent recombination of the photoelectrons created near the back surface. The backside process developed at THOMSON-CSF involves a shallow p+ implantation activated by laser annealing. Results obtained on thinned frame-transfer CCDs (576 x 384 Pixels) are presented : a quantum efficiency of 50% at 3500 A (25°C) and in excess of 60% in the range 4000 A - 6500 A (25°C) without antireflection coating. Preliminary results with VUV and soft X-ray are also given. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
