Metal oxide gas sensor for high temperature application
| Autor: | C. Kaufmann, G. Springer, Thomas Gessner, B. Zimmermann, M. Vogel, E. Charetdinov, Knut Gottfried, Peter Hauptmann, U. Dietel, R. Hoffmann, Ralf Lucklum, U. Weiss |
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| Rok vydání: | 2000 |
| Předmět: |
Silicon
Chemistry Analytical chemistry Oxide chemistry.chemical_element Condensed Matter Physics Toluene Electronic Optical and Magnetic Materials Electrochemical gas sensor chemistry.chemical_compound Chemical engineering Hardware and Architecture Gas detector Electrical and Electronic Engineering Thin film Layer (electronics) Syngas |
| Zdroj: | Microsystem Technologies. 6:169-174 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | The present study is focused on the development of a gas sensor for application in a high temperature environment. The sensor has been realised using thin films prepared on silicon substrates including a high temperature stable heating and wiring system. TiO2 acts as sensitive layer. Measurements have been carried out in synthetic gas mixtures as well as in gases in a given application. Neural networks and multivariate data analysis have been used for determining the gas concentrations. The capability to detect CO, NO x , and toluene is shown. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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