Growth characteristics of graphene synthesized via chemical vapor deposition using carbon tetrabromide precursor

Autor: Hanearl Jung, Ki Yeung Mun, Soo-Hyun Kim, Taejin Choi, Chang Wan Lee, Hyungjun Kim, Jusang Park
Rok vydání: 2015
Předmět:
Zdroj: Applied Surface Science. 343:128-132
ISSN: 0169-4332
Popis: A carbon tetrabromide (CBr 4 ) precursor was employed for the chemical vapor deposition (CVD) of graphene, and the graphene growth characteristics as functions of the following key factors were then investigated: growth time, growth temperature, and the partial pressure of the precursor. The graphene was transferred onto a SiO 2 /Si substrate and characterized using transmission electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy, and the electrical properties were measured through the fabrication of field-effect transistors. Our results show that high yield and controllable growth are possible via CVD used with a CBr 4 precursor. Thus, CBr 4 precursor is a new alternative candidate for use in the mass production of graphene.
Databáze: OpenAIRE