Dielectric charging in MEMS switches after ion-gun irradiation

Autor:	L. Castaner, D. Molinero
Rok vydání:	2007
Předmět:	Dielectric absorption Materials science Dielectric strength business.industry Gate dielectric Analytical chemistry Liquid dielectric Optoelectronics Dielectric barrier discharge Dielectric business Ion gun High-κ dielectric
Zdroj:	2007 Spanish Conference on Electron Devices.
DOI:	10.1109/sced.2007.384027
Popis:	In this paper we introduce a novel method to characterize dielectric charging phenomena based on the discharge current measurement. The dielectric is charged using an ion gun radiation. It is shown that both the charge sign and amount can be independently measured and that the results can be related to the pull-in shift as measured from C-V characteristics. Analysis of several time constants extracted from discharge current measurement provides further insight on the charge dynamics, governed by the dielectric parameters.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3bb000b3cca830204d9a5988a349827b https://doi.org/10.1109/sced.2007.384027 Zobrazit plný text záznamu