In-Situ Formation of As-H-Functions by β-Elimination of Specific Metalorganic Arsenic Compounds for the MOVPE of III/V-Semiconductors

Autor:	G. Zimmerman, H. Protzmann, W. Stolz, E.O. Gobel, P. Gimmnich, A. Greiling, J. Lorberth, C. Thalmann, K. Rademann
Rok vydání:	2005
Zdroj:	Sixth International Conference Metalorganic Vapor Phase Epitaxy.
DOI:	10.1109/movpe.1992.665037
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ba17d83b73e0d4a3640c9d2538bd6a6 https://doi.org/10.1109/movpe.1992.665037 Zobrazit plný text záznamu