The micromilling process for high aspect ratio microstructures

Autor:	C. R. Friedrich, M. J. Vasile
Rok vydání:	1996
Předmět:	Hardware and Architecture Electrical and Electronic Engineering Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Microsystem Technologies. 2:144-148
ISSN:	1432-1858 0946-7076
DOI:	10.1007/s005420050032
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ba0887ab5f9635ca090771d863003e6 https://doi.org/10.1007/s005420050032 Zobrazit plný text záznamu Full text from SpringerLink