Integration of polymer and metal microstructures using liquid-phase photopolymerization
| Autor: | Hongrui Jiang, David J. Beebe, Abhishek K. Agarwal |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
chemistry.chemical_classification
Fabrication Materials science Mechanical Engineering Microfluidics Micromixer Nanotechnology Polymer Photoresist Casting Electronic Optical and Magnetic Materials Photopolymer chemistry Mechanics of Materials Electroforming Electrical and Electronic Engineering Composite material |
| Zdroj: | Journal of Micromechanics and Microengineering. 16:332-340 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/16/2/018 |
| Popis: | In this paper we demonstrate, using a fabrication technique, liquid-phase photopolymerization (LP3) for the relatively fast and low-cost integration of thick polymers and electroformed metal microstructures to develop a range of microfluidic components and systems. Liquid-phase UV-photosensitive polymers, similar to negative-tone photoresists, are used to create both polymer microstructures and molds to define electroformed metal (here, nickel—Ni) microstructures. This fabrication process can act as a stand-alone or appended one; it is gentle to allow processing after a metal structure has been released since fabrication occurs only at designated areas on a substrate, i.e. no spinning/casting of photosensitive materials, and self-planarization is achieved since photopolymerization of polymers occurs in the liquid phase. Photopatterned polymer and electroformed Ni microstructures are fabricated using LP3 with a low-end (low-cost) lithographic system. A variety of functional microfluidic components and systems, e.g., an active and a passive chaotic micromixer, and gear trains, are fabricated by utilizing a sequential step-and-repeat LP3 process to demonstrate the integration of polymers and metals. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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