A multi-step DRIE process for a 128 × 128 micromirror array

Autor:	Norinao Kouma, Ippei Sawaki, Xiaoyu Mi, Satoshi Ueda, Hiromitsu Soneda, Hisao Okuda, Yoshihiro Mizuno, Osamu Tsuboi, Masafumi Iwaki
Rok vydání:	2004
Předmět:	Optics Materials science business.industry Optical testing Micromirror array Process (computing) Deep reactive-ion etching Optoelectronics business Optical arrays
Zdroj:	2003 IEEE/LEOS International Conference on Optical MEMS (Cat. No.03EX682).
DOI:	10.1109/omems.2003.1233463
Popis:	A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This process was used to fabricate a dual-axis 128 /spl times/ 128 micromirror array with a high resonance frequency.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3b60eb3f61a31294c2e14fbae944de04 https://doi.org/10.1109/omems.2003.1233463 Zobrazit plný text záznamu