Use of golden samples for the assessment of the quality and reproducibility of scanning acoustic microscopy images of electronics samples
| Autor: | Nicolas Porcher, Michael Hertl, Fabien Allanic, Isaline Richard, Pauline Serre, Sandra Dureau, Nicolas Vivet, Armelle Minguet |
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| Rok vydání: | 2018 |
| Předmět: |
Image quality
Computer science Sample (material) media_common.quotation_subject Scanning Acoustic Microscopy 02 engineering and technology 01 natural sciences 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Quality (business) Electronics Electrical and Electronic Engineering Safety Risk Reliability and Quality media_common 010302 applied physics Reproducibility business.industry System of measurement Pattern recognition Condensed Matter Physics Atomic and Molecular Physics and Optics 020202 computer hardware & architecture Surfaces Coatings and Films Electronic Optical and Magnetic Materials Transducer Artificial intelligence business |
| Zdroj: | Microelectronics Reliability. :282-287 |
| ISSN: | 0026-2714 |
| Popis: | Scanning Acoustic Microscopy (SAM) is a widely used technology for non-destructive failure analysis in electronics samples. The primary information generated by SAM is a grey scale image, which is the basis for the interpretation by the failure analysis engineer. The quality of this primary image depends, amongst others, on the system setup by the operator and on the selected transducer. Therefore, if SAM analyses of a given sample are performed by several engineers using different types of SAM systems, then in general the obtained images differ. In the present study we introduce specifically manufactured golden samples with single or stacked dice including known defects for assessing the image quality and reproducibility of SAM images. These golden samples represent a robust measurement standard. They are particularly suited for studying and then minimizing differences in SAM image quality obtained by different operators and/or different types of SAM measurement equipment. Ultimately, they will allow to homogenize the SAM image quality on different kinds of typical standard samples on a high level, and thus contribute to reliable failure identification independently of the specific operator or measurement system. |
| Databáze: | OpenAIRE |
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