Depth profiling light nuclei in single crystals: A combined nuclear reaction and RBS technique to minimize unwanted channeling effects

Autor: A. L'Hoir, O. Jaoul, James D. Cawley, D. Schmaus
Rok vydání: 1981
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research. 191:357-366
ISSN: 0167-5087
DOI: 10.1016/0029-554x(81)91029-6
Popis: The difficulties of depth profiling in single crystals, using MeV light ion beams, are discussed with particular emphasis on planar channeling effects. Depth profiling of 18 O self-diffused crystals (corundum, Al 2 O 3 ; forsterite, Mg 2 SiO 4 ) via the 18 O(p, α ) 15 N nuclear reaction is used as an illustration. The effects on the alpha spectrum of channeling the proton beam along major axes and planes are described. There is a high probability that planar channeling effects distort the spectra strongly when the proton beam is incident on the crystals off axis but with any azimuthal orientation. A simple routine procedure is presented to minimize such unwanted effects, based on a combined use of nuclear reaction depth profiling and RBS techniques.
Databáze: OpenAIRE