Laser Photolysis And Ionization Of Polyatomic Molecules: Film Growth And Spectroscopic Diagnostics

Autor:	C. C. Abele, J. F. Osmundsen, James Gary Eden, David B. Geohegan
Rok vydání:	1984
Předmět:	Materials science Excimer laser medicine.medical_treatment Photodissociation Polyatomic ion Analytical chemistry chemistry.chemical_element Substrate (electronics) Ion chemistry Ionization medicine Absorption (chemistry) Indium
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.939430
Popis:	Experiments are described in which semiconductor or metal films are grown from the vapor phase by photodissociating or photoionizing diatomic or polyatomic molecules. The photolysis of GeH 4 at 248 nm Mw = 5 eV) is initiated by a two photon process that liberates the germylene radical GeH 2 . Spatially and temporally-resolved concentration profiles for several excited states of GeH and atomic Ge have been measured near the substrate. Thin indium films have been deposited on nickel substrates by dissociatively ionizing indium monoiodide (InI) to produce In + - I - ion pairs. The dynamics of ion pair production for thallium iodide or InI vapor photoexcited at 193 nm have been studied by combining an excimer laser with microwave absorption techniques.
Databáze:	OpenAIRE
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