Development of magnetohydrodynamic computer modeling of gas-discharge EUV sources for microlithography

Autor:	Bruno S. Bauer, Roberto C. Mancini, Volodymyr Makhin, Ioana Paraschiv, Andrey Esaulov, Radu Presura, Irvin R. Lindemuth, Peter T. Sheehey, Bryan J. Rice
Rok vydání:	2004
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ae429b0471df4e3dcda5589080cba70 https://doi.org/10.1117/12.536289 Zobrazit plný text záznamu