Nanotomography based on hard x-ray microscopy with refractive lenses

Autor:	Bruno Lengeler, Irina Snigireva, A. A. Snigirev, Christoph Rau, Christian G. Schroer, Jannik C. Meyer, Boris Benner, Til Florian Gunzler, Timm Weitkamp, Marion Kuhlmann
Rok vydání:	2002
Předmět:	Physics Microscope Physics and Astronomy (miscellaneous) Opacity business.industry Resolution (electron density) X-ray optics Refraction law.invention Lens (optics) Optics law Microscopy Tomography business
Zdroj:	Applied Physics Letters. 81:1527-1529
ISSN:	1077-3118 0003-6951
Popis:	Based on parabolic refractive x-ray lenses we have built a hard x-ray microscope that allows one to image the interior of opaque samples with submicrometer resolution. We have combined magnified imaging with tomography to obtain the three-dimensional structure of the sample at a resolution well below 1 μm. Using an aluminum lens to record a magnified tomogram of a test sample (microprocessor), a resolution of slightly above 400 nm was found for the three-dimensional reconstruction. Lenses made of beryllium are expected to improve this resolution to well below 100 nm. The resulting challenges concerning instrumentation and numerical methods are discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ae27b7d27e3331598706715568b2a0e https://doi.org/10.1063/1.1501451 Zobrazit plný text záznamu