Investigation of the refractive index reproducibility for tantalum pentoxide coatings, prepared by PVD techniques

Autor:	Jens Harhausen, Kai Starke, Olaf Stenzel, Roman Rauhut, Lars Mechold, Mark Schürmann, Josephine Wolf, Holger Reus, Rüdiger Foest, Detlev Ristau, Martin Bischoff, Michael Kennedy, Harro Hagedorn, Henrik Ehlers, Florian Carstens, Steffen Wilbrandt, Alfons Zöller, Tobias Nowitzki, Jens Schumacher, Norbert Kaiser, Thomas Hegemann, Stefan Schippel
Rok vydání:	2016
Předmět:	Reproducibility Ion beam sputtering Materials science business.industry Analytical chemistry Sputter deposition Electron beam physical vapor deposition Condensed Matter::Materials Science chemistry.chemical_compound Absorption edge chemistry Physics::Plasma Physics Attenuation coefficient Tantalum pentoxide Physics::Accelerator Physics Optoelectronics business Refractive index
Zdroj:	Optical Interference Coatings 2016.
Popis:	Random effects in the reproducibility of refractive index and absorption edge position of Ta2O5 layers prepared by plasma-ion assisted electron beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3ade94e69f46f0dfe883f2bb7d9e485d https://doi.org/10.1364/oic.2016.thd.2 Zobrazit plný text záznamu