An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors
| Autor: | Po-jui Chen, Yu-hsin Lin, Wen-Hao Cho, Jian-Lin Chen, Chen Chih-Wen, Chen Ming-Fu, Lin Yi-Hao |
|---|---|
| Rok vydání: | 2020 |
| Předmět: | |
| Zdroj: | Photonic Instrumentation Engineering VII. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|