| Popis: |
We have performed in situ photoelectron spectroscopy measurements (XPS, UPS) and ex situ characterization techniques (AES depth profiling, SEM, α-step) on BC coatings prepared by radiofrequency PACVD method using different mixtures of diborane and methane, as well as trimethylboron. The deposition has been made on Si substrates at room temperature. The coatings were hard and did not peel off after exposure to air. The compositions of the coatings, deposited with diborane and methane are correlated to the mixture of the process gas. Additionally we found oxygen contaminations (up to 5 at%) in the films, which are not incorporated in the form of boron oxide (B 2 O 3 ). Using trimethylboron as process gas we prepared films with an oxygen level below 0.5 at%. These coatings are slightly boron enriched as compared to the gas phase stoichiometry. |
