Ultrathin single‐crystalline LiNbO 3 film bulk acoustic resonator for 5G communication

Autor:	Zijing Fang, Leihe Lu, Weipeng Xuan, Hao Jin, Jikui Luo, Shurong Dong
Rok vydání:	2020
Předmět:	Microelectromechanical systems Electromechanical coupling coefficient Materials science business.industry Lithium niobate Piezoelectricity chemistry.chemical_compound Resonator Quality (physics) chemistry Etching Optoelectronics Electrical and Electronic Engineering Thin film business
Zdroj:	Electronics Letters. 56:1142-1143
ISSN:	1350-911X 0013-5194
DOI:	10.1049/el.2020.1922
Popis:	This Letter reports a high-performance film bulk acoustic resonator (FBAR) that can be applied in 5G wireless communication. The FBAR has a back-etched free-standing structure using an ultra-thin single-crystalline lithium niobate (LiNbO3) as the piezoelectric film. The thin LiNbO3 was obtained by the smart cut method and FBARs were fabricated by a standard MEMS process. Owing to the superior bulk-like properties of the single-crystal thin film, the fabricated FBARs have a resonant frequency of 5.0 GHz, a quality factor above 1800 and an electromechanical coupling coefficient of 2.66%, demonstrating a promising potential of FBAR filters in 5G and future 6G applications.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3a30d25b0a27fa57cfc3fea3ccf4e138 https://doi.org/10.1049/el.2020.1922 Zobrazit plný text záznamu Plný text