Design of low-power silicon articulated microrobots

Autor:	Kristofer S. J. Pister, S. Hollar, Richard Yeh
Rok vydání:	2001
Předmět:	Engineering business.industry Mechanical Engineering Photovoltaic system Electrical engineering Chip Surface micromachining Comb drive Control theory Electronic engineering Actuator business Engineering (miscellaneous) Voltage Robot locomotion
Zdroj:	Journal of Micromechatronics. 1:191-203
ISSN:	1568-5632 1389-2258
DOI:	10.1163/156856301760132105
Popis:	We are creating a class of autonomous low-power silicon articulated microrobots fabricated on a 1 cm2 silicon die and mounted with actuators, a controller, and a solar array. By taking advantage of the high force-density of electrostatic actuators in the micro scale, low-power actuators can be made for microrobots. A micromotor with an energy efficiency of 4%, that uses CMOS-compatible supply voltage, and has a motion resolution of 2 μm has been demonstrated in a volume of 0.015 mm3. Articulated two degrees-of-freedom legs with built-in mechanical couplings have been fabricated in a commercial micromachining foundry (MUMPs) and successfully assembled. Lowpower CMOS electronics will be used to control the robot locomotion and a solar array chip will be used to power the microrobot.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3a2ff1812428f9b4cd4bf50ecec7987c https://doi.org/10.1163/156856301760132105 Zobrazit plný text záznamu