Autor:	I. Vitomirov, M.D. Gordon, Dana Dereus, Shawn J. Cunningham, Z.-X. He, N. Lai, Eric J. White, Jeffrey C. Maling, William J. Murphy, C. Gillman, S.L. Luce, B.K. Wong, Art Morris, A. K. Stamper, Christopher V. Jahnes
Rok vydání:	2012
Předmět:	Microelectromechanical systems Capacitor Materials science business.industry law Electrical engineering business law.invention
Zdroj:	2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
DOI:	10.31438/trf.hh2012.30
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::39f65663a9c8962c44431278159c1eb5 https://doi.org/10.31438/trf.hh2012.30 Zobrazit plný text záznamu