High‐Sensitivity Profilometry for Measurement of Multilayer Structure with Low‐Coherence Composite Interferometer

Autor:	Yu-Kai Lin, I-Jen Hsu, Chi-Chu Cheng
Rok vydání:	2021
Předmět:	Interferometry Optics Materials science Mechanics of Materials business.industry Composite number General Materials Science Sensitivity (control systems) Profilometer business Industrial and Manufacturing Engineering Coherence (physics)
Zdroj:	Advanced Materials Technologies. 6:2000823
ISSN:	2365-709X
DOI:	10.1002/admt.202000823
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::39cf4b65dba8ff2bb3c8d544ba2f4e89 https://doi.org/10.1002/admt.202000823 Zobrazit plný text záznamu Plný text