Characteristics of n-Channel MOSFETs With Tailored Source/Drain Extension for Mask ROM and EEPROM Applications

Autor: Yuan-Feng Chen, Jeng Gong, Wei-Jen Tung, Shang-Wei Chou, E. S. Jeng
Rok vydání: 2009
Předmět:
Zdroj: IEEE Transactions on Electron Devices. 56:2099-2106
ISSN: 0018-9383
DOI: 10.1109/ted.2009.2026521
Popis: A novel 2-bits-per-transistor mask-programmable read-only memory (mask ROM) device with gate-to-drain nonoverlapped implantation (NOI) is investigated in this paper. The NOI mask ROM can be coded by using the lightly doped drain implantation mask and related processes. This simple coding scheme is fully compatible with industrial CMOS processing. The measured threshold voltage difference DeltaVth between the two logic states (ldquo0rdquo and ldquo1rdquo) of the devices is approximately 0.6 V. Moreover, DeltaVth can be improved when the pocket implant is incorporated into the NOI region based on the device simulation. The characteristics of this NOI mask ROM, including 2-bits-per-transistor operation, body effects, hot carrier impact, and array layouts, are investigated. By sharing the same array layout and readout circuit, the potential of NOI devices' seamless migration between the mask ROM and electrically erasable programmable read-only memory functions are also demonstrated.
Databáze: OpenAIRE