Precise Comparison of Two-dimensional Dopant Profiles Measured by Low-voltage Scanning Electron Microscopy and Electron Holography Techniques

Autor:	Jun-Mo Yang, Won Tae Kim, Choong-Kyun Rhee, Jung-Ho Yoo, Moon-Seop Hyun, Noh-Yeal Kwak
Rok vydání:	2012
Předmět:	Optics Materials science Dopant Scanning electron microscope business.industry Scanning confocal electron microscopy General Medicine p–n junction business Low voltage Electron holography
Zdroj:	Applied Microscopy. 42:158-163
ISSN:	2287-5123
DOI:	10.9729/am.2012.42.3.158
Popis:	Detailed comparison of low-voltage scanning electron microscopy and electron holography techniques for two-dimensional (2D) dopant profiling was carried out with using the same multilayered p-n junction specimen. The dopant profiles obtained from two methods are in good agreement with each other. It demonstrates that reliability of dopant profile measurement can be increased through precise comparison of 2D profiles obtained from various microscopic techniques.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::39ba8bb4f29a9bc631af830a1a095b13 https://doi.org/10.9729/am.2012.42.3.158 Zobrazit plný text záznamu