UV-laser assisted fabrication of dispersive structures in polymeric integrated-optical components

Autor:	Carsten Wochnowski, K. Meteva, S. Metev, Frank Vollertsen
Rok vydání:	2003
Předmět:	chemistry.chemical_classification Fabrication Laser ablation Materials science business.industry Physics::Optics Near and far field Polymer Grating Laser law.invention Optics Planar chemistry law Optoelectronics Near-field scanning optical microscope Physics::Atomic Physics business
Zdroj:	Fourth International Symposium on Laser Precision Microfabrication.
ISSN:	0277-786X
DOI:	10.1117/12.540767
Popis:	In this article the fabrication of grating structures in the surface of planar polymer chips by the phase mask method is discussed. By this way surface relief gratings (SRG) and bragg-structures can be generated by UV-laser irradiation. Especially the topographical surface properties of the gratings have been examined. Potential applications are the field of optical sensor and information technology.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::39b93522ba7a4ec368c0521fe26b1ac3 https://doi.org/10.1117/12.540767 Zobrazit plný text záznamu