Micro‐machined fluidic devices for terahertz time‐domain spectroscopy

Autor:	J. Martyn Chamberlain, Andrew J. Gallant, Adam J. Baragwanath, Dagou A. Zeze, DeChang Dai, G. Peter Swift
Rok vydání:	2011
Předmět:	Materials science Terahertz radiation Cleanroom Microfluidics Nanotechnology Fluidics Condensed Matter Physics Spectroscopy Terahertz time-domain spectroscopy Sensitivity (electronics) Lithography
Zdroj:	physica status solidi c. 8:2935-2937
ISSN:	1610-1642 1862-6351
DOI:	10.1002/pssc.201084088
Popis:	Here we present a silicon based, micro-machined fluidic device for terahertz frequencies, fabricated using standard lithographic and micro-machining processes in a cleanroom environment. Designed for use in a conventional transmission terahertz time-domain spectroscopy (THz-TDS) arrangement, we present a possible solution to the ‘water problem’ currently hampering the analysis of aqueous and biological systems at THz frequencies. We detail results from a range of experiments, highlighting the device sensitivity and potential, wide-ranging applications. (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Databáze:	OpenAIRE
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