MECHANISMS AND MODELLING OF THE HEAT AND OF MASS TRANSFER DURING ATOMIC OXYGEN RECOMBINATION ON METALLIC SEMICONDUCTORS IN A PLASMA REACTOR
Autor: | C. Guyon, N. Rouckout, S. Cavadias, Jacques Amouroux |
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Rok vydání: | 2023 |
Zdroj: | Proceeding of Progress in Plasma Processing of Materials, 2003. |
DOI: | 10.1615/itppc-2002.400 |
Databáze: | OpenAIRE |
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