Model for reactive sputtering Optimisation results for YBaCuO thin films deposited on polycrystalline zirconia substrates

Autor:	Annick F. Dégardin, E. Caristan, T. Pech, Alain J. Kreisler
Rok vydání:	1997
Předmět:	Materials science Mechanics of Materials Sputtering Mechanical Engineering Materials Chemistry Metals and Alloys Cubic zirconia Crystallite Thin film Composite material Yttria-stabilized zirconia
Zdroj:	Journal of Alloys and Compounds. 251:107-110
ISSN:	0925-8388
Popis:	In order to study in situ elaboration of YBaCuO thin films sputtered on polycrystalline YSZ substrates, a model of reactive sputtering has been developed. c -axis oriented YBaCuO films were obtained with J c ≈3×10 4 A/cm 2 at 77 K measured on 55×55 μm 2 microbridges.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::397855094c8856e93b23bc59d6222e4b https://doi.org/10.1016/s0925-8388(96)02779-x Zobrazit plný text záznamu Full Text from ScienceDirect