Photochemical generation and deposition of copper from a gas phase precursor

Autor:	Frances A. Houle, Thomas H. Baum, Caroline A. Kovac, Carol R. Jones
Rok vydání:	1985
Předmět:	chemistry.chemical_classification Physics and Astronomy (miscellaneous) Silicon chemistry Ultraviolet light chemistry.chemical_element Deposition (phase transition) Chemical vapor deposition Photochemistry Decomposition Chemical composition Copper Coordination complex
Zdroj:	Applied Physics Letters. 46:97-99
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.95811
Popis:	The photochemical generation and deposition of copper metal from a volatile copper coordination complex are described. Pulsed and cw ultraviolet light sources were used to induce deposition. The chemical compositions of the films are compared for all methods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::39623946a9dc85b3a2852805fb2cc82d https://doi.org/10.1063/1.95811 Zobrazit plný text záznamu