Real time in-situ thickness control of Fabry—Perot cavities in MBE by 44 and 88 wavelength ellipsometry

Autor:	B. Johs, M.D. Boonzaayer, C.-H. Kuo, G.N. Maracas, D.K. Schroder, M.F. DeHerrera
Rok vydání:	1997
Předmět:	In situ Reproducibility Chemistry business.industry Feedback control Condensed Matter Physics Inorganic Chemistry Wavelength Reflection (mathematics) Optics Ellipsometry Materials Chemistry business Fabry–Pérot interferometer Molecular beam epitaxy
Zdroj:	Journal of Crystal Growth. :281-285
ISSN:	0022-0248
DOI:	10.1016/s0022-0248(96)01233-x
Popis:	We have demonstrated how to use the 44 wavelength ellipsometer for in-situ closed-loop feedback control of a molecular beam epitaxy in order to grow reproducible AlAs GaAs Fabry—Perot cavities. Sample-to-sample reproducibility of the Fabry—Perot cavity mode position measured using normal incident reflection was better than 0.2% among six samples grown at different times and different growth conditions. This shows that a reproducible control of AlAs GaAs layer thickness is achievable using the 44 wavelength ellipsometer. The new 88 wavelength ellipsometer includes UV wavelengths from 2770 to 4150 A. The closed-loop in-situ control of Fabry—Perot cavity growth will be explained and the results from the two types of ellipsometers will be compared.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::395420f6103a2cdbbb9a1194674d8c9b https://doi.org/10.1016/s0022-0248(96)01233-x Zobrazit plný text záznamu Full Text from ScienceDirect