Modification Of The Statistical Microroughness Of Surfaces By Thin Film Deposition: A Model

Autor:	Angela Duparré, Heinz-Guenter Walther
Rok vydání:	1989
Předmět:	Surface (mathematics) Optics Materials science Scattering business.industry Surface roughness Surface finish Thin film business Light scattering Smoothing
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.949454
Popis:	A model describing the modification of a surface roughness profile due to thin film deposition is presented. Surface smoothing as well as roughening are found to be significant effects. Conclusions which can be drawn from the roughness model with respect to related light scattering make it possible to interpret film scattering experimentally observed.
Databáze:	OpenAIRE
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