Photosensitive polyimide application for multi-chip packages

Autor: Koetsu Tamura, Shinichi Hasegawa, Ken Seino, Kohji Kimbara, Tatsuo Inoue
Rok vydání: 1992
Předmět:
Zdroj: Journal of Photopolymer Science and Technology. 5:385-392
ISSN: 1349-6336
0914-9244
Popis: This paper introduces the photosensitive polyimide application for the NEC SX-3 Supercomputer. In case of supercomputers, sophisticated packaging technologies are essential to achieve fastest operations as well as to use highest-speed, highly integrated LSIs.Wiring substrate which mounts and interconnects LSIs is the key to back up LSI's higher logical-operations.The high speed interconnection wirings and high density LSI mounting are requested for the substrate.The Multi-Chip Package using Photosensitive Polyimide had been developed to meet these demands.25μm wide, 75μm center-to-center spacings, four signal layers, 6ns/cm signal transmissions on a 225mm square substrate have been achieved by using this photosensitive polyimide multi layer substrate technology.
Databáze: OpenAIRE