Ion beam synthesis of CoSi2: Influence of surface kinetics on nucleation
| Autor: | Vladimir A. Borodin, Alexander E. Volkov, M.O. Ruault, H. Bernas |
|---|---|
| Rok vydání: | 2001 |
| Předmět: |
010302 applied physics
Nuclear and High Energy Physics Materials science Ion beam Kinetics Nucleation 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Physics::Geophysics Crystallography Transmission electron microscopy Chemical physics Impurity Desorption 0103 physical sciences Coupling (piping) Absorption (chemistry) 0210 nano-technology Instrumentation Physics::Atmospheric and Oceanic Physics |
| Zdroj: | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 178:327-330 |
| ISSN: | 0168-583X |
| DOI: | 10.1016/s0168-583x(01)00514-6 |
| Popis: | The experimentally observed kinetics of CoSi2 precipitate nucleation in Si during Co implantation are compared with the predictions of an analytical model that includes the coupling between absorption/desorption of impurity atoms at the precipitate surface and impurity diffusion from the bulk. The comparison shows that in this system, precipitate nucleation deviates considerably from the thermodynamical form. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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