The first surface micromachined pressure sensor for cardiovascular pressure measurements
| Autor: | E. Kalvesten, L. Smith, G. Stemme, L. Tenerz |
|---|---|
| Rok vydání: | 2002 |
| Předmět: |
Pressure sensitivity
Materials science business.industry musculoskeletal neural and ocular physiology Cardiovascular Pressure Electrical engineering Diaphragm (mechanical device) Pressure sensor Surface micromachining Blood pressure otorhinolaryngologic diseases Silicon chip sense organs business psychological phenomena and processes Piezoresistive pressure sensors Biomedical engineering |
| Zdroj: | Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176). |
| DOI: | 10.1109/memsys.1998.659821 |
| Popis: | A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon diaphragm area of 103/spl times/103 /spl mu/m has been fabricated. The piezoresistive pressure sensor has a typical pressure sensitivity of 2.0 /spl mu/V/V mmHg which results in a blood pressure measurement accuracy better than 2 mmHg. This new pressure sensor is used clinically for blood pressure measurements in balloon angioplasty applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|